干式真空泵

Flange

Inlet

CF100

Outlet

KF25

Volume Flow Rate

N2 (L/s)

240

N2 with protective screen (L/s)

230

H2 (L/s)

160

Maximum Compression Ratio

N2

1 x 10⁸

H2

4 x 10⁴

Ultimate Pressure

Torr

< 3.8 x 10^-9

Pa

< 5 x 10^-7

Maximum Throughput

N2 (sccm)

70

N2 (Pa x L/s)

130

Ar (sccm)

50

Ar (Pa x L/s)

90

Maximum Backing Pressure

Torr

5.3

Pa

700>

Recommended Backing Pump

L/min

≥ 80

CFM

≥ 2.8>

Startup Time

min

5.5 - 6.0

Shutdown Time

min

45.0 - 50.0

Vibration Level (0 - peak)

μm

≤ 0.2

Rated Rotational Speed

min-1

48000

Installation Position

Any

Cooling System

Forced Air Cooling

Bearing System

Grease-Lubricated Ball Bearing

Permissible Ambient Temperature

Deg C

8.0-38.0

Deg F

46-100>

Major Materials

Al Alloy

Weight

kg

10.5

lb

23.1

Bearing Life

hours

20,000