干式真空泵

Flange

Inlet

ISO-R100

Outlet

KF25

Volume Flow Rate

N2 (L/s)

220

N2 with protective screen (L/s)

210

H2 (L/s)

100

Maximum Compression Ratio

N2

1 x 10⁸

H2

4 x 10²

Ultimate Pressure

Torr

< 7.5 x 10^-9

Pa

< 1 x 10^-6

Maximum Throughput

N2 (sccm)

400

N2 (Pa x L/s)

730

Ar (sccm)

400

Ar (Pa x L/s)

730

Maximum Backing Pressure

Torr

2.0

Pa

260

Recommended Backing Pump

L/min

≥ 80

CFM

≥ 2.8>

Startup Time

min

1.0 - 1.2

Shutdown Time

min

2.5 - 3.5

Vibration Level (0 - peak)

μm

≤ 0.2

Rated Rotational Speed

min-1

48000

Installation Position

Any

Cooling System

Water Cooling

Bearing System

Grease-Lubricated Ball Bearing

Permissible Ambient Temperature

Deg C

10.0-35.0

Deg F

50-104

Major Materials

Al Alloy

Weight

kg

5.5

lb

12.0>

Bearing Life

hours