干式真空泵

Flange

Inlet

CF100

Outlet

KF25

Volume Flow Rate

N2 (L/s)

330

N2 with protective screen (L/s)

310

H2 (L/s)

210

Maximum Compression Ratio

N2

1 x 10⁸

H2

2 x 10³

Ultimate Pressure

Torr

< 7.5 x 10^-9

Pa

< 1 x 10^-6

Maximum Throughput

N2 (sccm)

500

N2 (Pa x L/s)

920

Ar (sccm)

250

Ar (Pa x L/s)

460

Maximum Backing Pressure

Torr

2.0

Pa

260>

Recommended Backing Pump

L/min

≥ 80

CFM

≥ 2.8>

Startup Time

min

2.0 - 2.5

Shutdown Time

min

5.0 - 6.5

Vibration Level (0 - peak)

μm

≤ 0.2

Rated Rotational Speed

min-1

45000

Installation Position

Any

Cooling System

Forced Air Cooling

Bearing System

Grease-Lubricated Ball Bearing

Permissible Ambient Temperature

Deg C

10.0-32.0

Deg F

50-90

Major Materials

Al Alloy

Weight

kg

9.0

lb

19.8>

Bearing Life

hours

20,000