干式真空泵

Inlet flange

ISO-B250

Outlet flange

NW40, NW50

Input voltage

200 - 240 VAC - 15%+10%

   Phase

Single

   Frequency

50/60 Hz

   Current
   Power

Max. 5.3 A
Max. 0.9 kVA

Pumping Speed, L/s

N₂

2200

H₂

1800

Maximum compression ratio

N₂

>2x10⁸

H₂

3x10³

Ultimate pressure

Pa (Torr)

<1x10^-6 (7.5x10^-9)

Maximum foreline pressure

Pa (Torr)

100 (0.75)

Maximum Throughput

N₂

5520 Pa L/s (3000 sccm)

Ar

4790 Pa L/s (2600 sccm)

Mounting orientation

Any

Communication module

Parallel I/O, RS232C, RS485, Profibus, or DeviceNet

Cooling system

Water cooling

Weight

kg (lbs)

62 (137)