干式真空泵

Flange

Inlet

ISO-B250

Outlet

NW 40

Volume Flow Rate

N₂ (L/s)

2400

H₂ (L/s)

2300

Ar (L/s)

1100

Maximum Compression Ratio

N₂

1x10⁸

H₂

1.4x10³

Ultimate Pressure CF / ISO-B

Torr

< 7.5x10^-9

Pa

< 1x10^-6

Allowable Outlet Pressure

Torr

1.5

Pa

200

Maximum Throughput

N₂ (sccm)

3000

N₂ (Pa x L/s)

5520

Ar (sccm)

2000

Ar (Pa x L/s)

3680

Revolution Speed

RPM

31,200

Startup Time

Minutes

4 - 5

Shutdown Time

Minutes

4 - 5

Installation Position

Any

Vibration Level (0 - peak)⁷

μm

< 0.005

Pump Bake Out Temperature

Deg C

Max 120

Bearing System

5-axis magnetic bearing

Cooling System

Water/Air

Cooling Water Flow Rate

L/min

1.5

Recommended Backing pump

L/min

≥ 500

N2 Gas Throughput for Purging

sscm

20

Pa-L/sec

36.8

Weight ISO-B/CF

lb

99/118

kg

45/54