干式真空泵

Flange

Inlet

ISO-B160 / CF160

Outlet

NW 25

Volume Flow Rate

N₂ (L/s)

400

H₂ (L/s)

370

Ar (L/s)

300

Maximum Compression Ratio

N₂

1x10⁸

H₂

4.5x10³

Ultimate Pressure CF / ISO-B

Torr

< 7.5x10^-9

Pa

< 1x10^-6

Allowable Outlet Pressure

Torr

3

Pa

400

Maximum Throughput

N₂ (sccm)

2000

N₂ (Pa x L/s)

3680

Ar (sccm)

700

Ar (Pa x L/s)

1290

Revolution Speed

RPM

40,800

Startup Time

Minutes

2 - 3

Shutdown Time

Minutes

4 - 5

Installation Position

Any

Vibration Level (0 - peak)⁷

μm

< 0.01

Pump Bake Out Temperature

Deg C

Max 120

Bearing System

5-axis magnetic bearing

Cooling System

Water/Air

Cooling Water Flow Rate

L/min

1.5

Recommended Backing pump

L/min

≥ 160

N2 Gas Throughput for Purging

sscm

10

Pa-L/sec

18.4

Weight ISO-B/CF

lb

30/37

kg

14/17