满足通用真空需求的领先技术。针对不同的要求和行业。
Flange
Inlet
CF200
Outlet
KF40
Volume Flow Rate
N2 (L/s)
1100
N2 with protective screen (L/s)
1000
H2 (L/s)
720
Maximum Compression Ratio
N2
1 x 108
H2
1 x 104
Ultimate Pressure
Torr
< 7.5 x 10-9
Pa
< 1 x 10-6
Maximum Throughput
N2 (sccm)
330
N2 (Pa x L/s)
600
Ar (sccm)
300
Ar (Pa x L/s)
550
Maximum Backing Pressure
2.5
Recommended Backing Pump
L/min
≥ 250
CFM
≥ 8.8
Startup Time
min
7.0 - 9.0
Shutdown Time
27.0 - 32.0
Vibration Level (0 - peak)
μm
≤ 0.2
Rated Rotational Speed
min-1
33600
Installation Position
Any
Cooling System
Forced Air Cooling
Bearing System
Grease-Lubricated Ball Bearing
Permissible Ambient Temperature
Deg C
10.0-32.0
Deg F
50-90
Major Materials
Al Alloy
Weight
kg
28.0
lb
61.7
Bearing Life
hours
30,000
