Flange
Inlet
ISO-B250
Outlet
KF40
Volume Flow Rate
N2 (L/s)
2400
N2 with protective screen (L/s)
2300
H2 (L/s)
1100
Maximum Compression Ratio
N2
1 x 108
H2
1400
Ultimate Pressure
Torr
< 7.5 x 10-9
Pa
< 1 x 10-6
Maximum Throughput
N2 (sccm)
900
N2 (Pa x L/s)
1600
Ar (sccm)
750
Ar (Pa x L/s)
1380
Maximum Backing Pressure
Torr
1.5
Pa
200
Recommended Backing Pump
L/min
≥ 500
CFM
≥ 17.6
Startup Time
min
5.0 - 7.0
Shutdown Time
min
15.0 - 18.0
Vibration Level (0 - peak)
μm
≤ 0.2
Rated Rotational Speed
min-1
31200
Installation Position
Any
Cooling System
Forced Air Cooling
Bearing System
Grease-Lubricated Ball Bearing
Permissible Ambient Temperature
Deg C
10.0-32.0
Deg F
50-90
Major Materials
Al Alloy
Weight
kg
45.0
lb
99.2
Bearing Life
hours
30,000
