干式真空泵

满足通用真空需求的领先技术。针对不同的要求和行业。

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日本EBARA荏原ET450W分子泵维修
来源: | 作者:Ebara真空泵维修 | 发布时间: 2021-02-05 | 6 次浏览 | 分享到:
产品详情

Model

ET300W

ET450W

ET600W

ET800W

ETE801H

ET1301W

ET1600W

Pump

Pumping  Speed, L/s

N2

320

460

600

770

800

1300

1600

H2

200

300

220

450

550

900

1000

Max.  compression, L/s

N2

>109

>109

>109

>109

>109

>108

>109

H2

7 x  103

5 x  103

104

2 x  106

2 x  103

104

Ultimate  pressure, Pa

10-7 order

10-9 order

10-7order

Allowable  outlet pressure, Pa

400

40

266

400

Flange  standard

Inlet  side * 1

VG150

VG200

VG250

Outlet  size

KF25

KF40

Run-up  time in vacuum, min

6

7

8

6

8

Revolution,  min-1

48000

45000

35000

36000

38000

32000

30000

Installation  position

Any

Vibration  level (at rated speeds) µm (0-P)

<  0.01

Cooling  system

Water  cooling

Cooling  water flow rate, L/min

>  2

Cooling  water temperature, °C (°F)

<  25 (77)

Weight  of pump, kg (lb)

15  (33)

16  (35)

35  (77)

30  (66)

34  (75)

40  (88)

55  (121)

Model

306W-TF

456W-TF

606W-TF

806W-TF

806H-TF

1306W-TF

1606W-TF

Controller

Input

Phase  / Voltage

Single  - phase / AC100V~240V

Single  - phase / AC200V~240V

Current,  A*2

5 (8)

9

11

805

5

12

Weight,  kg (lb)

10  (22)

13  (39)

13  (39)

2  (26)

10  (22)

13  (39)

Allowable  length of connection cable

3.5~20m  (Tuning Free)

*1  Inlet  ports are available for a flange
 *2  () is Voltage 100V