干式真空泵

Flange

Inlet

ISO-B100  / CF100

Outlet

NW 25

Volume  Flow Rate

N₂ (L/s)

340

N₂ with  protective screen

320

H₂ (L/s)

290

Maximum  Compression Ratio

N₂

1x108

H₂

4.5x103

Ultimate  Pressure CF / ISO-B

Torr

<  7.5x10-9

Pa

<  1x10-6

Allowable  Outlet Pressure

Torr

3

Pa

400

Maximum  Throughput

N₂ (sccm)

2000

N₂ (Pa  x L/s)

3680

Ar  (sccm)

700

Ar (Pa x  L/s)

1290

Revolution  Speed

RPM

40,800

Startup  Time

Minutes

2 - 3

Shutdown  Time

Minutes

4 - 5

Installation  Position

Any

Vibration  Level (0 - peak)7

μm

<  0.01

Pump  Bake Out Temperature

Deg C

Max 120

Bearing  System

5-axis  magnetic bearing

Cooling  System

Water/Air

Cooling  Water Flow Rate

L/min

1.5

Recommended  Backing pump

L/min

≥ 160

N2 Gas  Throughput for Purging

sscm

10

Pa-L/sec

18.4

Weight  ISO-B/CF

lb

30/37

kg

14/17